# Cu evaporation experiences

**URL:** <https://forum.kavli.tudelft.nl/t/cu-evaporation-experiences/105>\
**Category:** Cleanroom / Fabrication\
**Created:** [15 June 2020 15:07 UTC](https://forum.kavli.tudelft.nl/t/cu-evaporation-experiences/105 "2020-06-15T15:07:34Z")\
**Posts on this page:** 4\
**Page:** 1

<div class="post-metadata">

**Author:** ![Rene](https://forum.kavli.tudelft.nl/letter_avatar_proxy/v4/letter/r/7cd45c/32.png) [@Rene](https://forum.kavli.tudelft.nl/u/Rene)\
**Post date:** [15 June 2020 15:07 UTC](https://forum.kavli.tudelft.nl/t/cu-evaporation-experiences/105/1 "2020-06-15T15:07:34Z")

</div>

I saw that e.g. the [Leybold L560](https://www.tudelft.nl/en/faculty-of-applied-sciences/about-faculty/departments/quantum-nanoscience/kavli-nanolab-delft/equipment/deposition/leybold-l560/) can be used to evaporate copper. I was wondering if someone has experience with this.  
Any experiences would be valuable, but I would be especially interested in experiences for conductance, especially at cryogenic temperatures (in particular ~4K) and oxidation behaviour.

If there is another way of depositing Cu (like electroplating) I would ofc also be interested.

---

<div class="post-metadata">

**Author:** ![Hadi](https://forum.kavli.tudelft.nl/letter_avatar_proxy/v4/letter/h/e99b99/32.png) [@Hadi](https://forum.kavli.tudelft.nl/u/Hadi)\
**Post date:** [16 June 2020 09:47 UTC](https://forum.kavli.tudelft.nl/t/cu-evaporation-experiences/105/2 "2020-06-16T09:47:51Z")

</div>

Hi Rene  
I have indeed sputter deposited Cu in Leiden cleanroom. It was a sputtering machine; The deposition itself is similar to any other metal and there is nothing especial.  
I used the films for a different purpose (as a catalyst for graphene growth) and thus I did not need to characterize the conductance. The film has to be kept in vacuum to prevent oxidation.

---

<div class="post-metadata">

**Author:** ![Rene](https://forum.kavli.tudelft.nl/letter_avatar_proxy/v4/letter/r/7cd45c/32.png) [@Rene](https://forum.kavli.tudelft.nl/u/Rene)\
**Post date:** [17 June 2020 07:37 UTC](https://forum.kavli.tudelft.nl/t/cu-evaporation-experiences/105/3 "2020-06-17T07:37:47Z")

</div>

Hi Hadi,  
thanks for sharing 🙂  
Do you know how bad do the oxide films get (just a few nm or would a 200nm film oxidize entirely through)? Are they self-terminating like in Al?

---

<div class="post-metadata">

**Author:** ![gsteele13](https://forum.kavli.tudelft.nl/letter_avatar_proxy/v4/letter/g/3d9bf3/32.png) [@gsteele13](https://forum.kavli.tudelft.nl/u/gsteele13)\
**Post date:** [19 June 2020 08:04 UTC](https://forum.kavli.tudelft.nl/t/cu-evaporation-experiences/105/4 "2020-06-19T08:04:10Z")

</div>

From what I know, oxides in Cu are messy, non self terminating and highly complex

(green roofs on buildings are one of the many copper oxides…)