I saw that e.g. the Leybold L560 can be used to evaporate copper. I was wondering if someone has experience with this.
Any experiences would be valuable, but I would be especially interested in experiences for conductance, especially at cryogenic temperatures (in particular ~4K) and oxidation behaviour.
If there is another way of depositing Cu (like electroplating) I would ofc also be interested.
Hi Rene
I have indeed sputter deposited Cu in Leiden cleanroom. It was a sputtering machine; The deposition itself is similar to any other metal and there is nothing especial.
I used the films for a different purpose (as a catalyst for graphene growth) and thus I did not need to characterize the conductance. The film has to be kept in vacuum to prevent oxidation.
Hi Hadi,
thanks for sharing 
Do you know how bad do the oxide films get (just a few nm or would a 200nm film oxidize entirely through)? Are they self-terminating like in Al?
From what I know, oxides in Cu are messy, non self terminating and highly complex
(green roofs on buildings are one of the many copper oxides…)